JPH0611996Y2 - 静電吸着装置 - Google Patents
静電吸着装置Info
- Publication number
- JPH0611996Y2 JPH0611996Y2 JP16306287U JP16306287U JPH0611996Y2 JP H0611996 Y2 JPH0611996 Y2 JP H0611996Y2 JP 16306287 U JP16306287 U JP 16306287U JP 16306287 U JP16306287 U JP 16306287U JP H0611996 Y2 JPH0611996 Y2 JP H0611996Y2
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- voltage
- pair
- temperature
- adsorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001179 sorption measurement Methods 0.000 title claims description 24
- 230000005686 electrostatic field Effects 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 239000002156 adsorbate Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16306287U JPH0611996Y2 (ja) | 1987-10-27 | 1987-10-27 | 静電吸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16306287U JPH0611996Y2 (ja) | 1987-10-27 | 1987-10-27 | 静電吸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0183750U JPH0183750U (en]) | 1989-06-05 |
| JPH0611996Y2 true JPH0611996Y2 (ja) | 1994-03-30 |
Family
ID=31447448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16306287U Expired - Lifetime JPH0611996Y2 (ja) | 1987-10-27 | 1987-10-27 | 静電吸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0611996Y2 (en]) |
-
1987
- 1987-10-27 JP JP16306287U patent/JPH0611996Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0183750U (en]) | 1989-06-05 |
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